PHYSICAL VAPOR DEPOSITION (PVD)
PVD is a line-of-sight process, where the vapour
stream profile is approximately a cosine distribution, provided that the mean
free path (MFP) of the evaporator molecules is larger than the scattering depth
of the residual atmosphere. At a pressure of 1 e-05 Torr (0.01 Pa), the MFP is
1 m. The distance between the substrate and source must be less than the MFP to
prevent loss of rate due to excessive scatter by the resident gas background.
To achieve uniform thickness deposition over a large substrate area requires
special geometrical considerations. The substrates are typically in motion
through the plume distribution to provide random time and area sampling. Substrate
tooling is rotated in planetary motion to accomplish uniformity. Various shapes
of occluding masking might be added to fine-tune the thickness uniformity. The
monitoring of thickness can be done indirectly using a quartz crystal oscillator or directly with an optical monitor. Coating systems are now
available that can automatically execute a multi-layer coating design and
control the thicknesses through the monitoring system.
Metals and sub-oxides can be starting materials for
depositing oxide compounds in a reactive deposition. Stoichiometric composition
of the oxide can be achieved, but the mechanical properties of the layer are
poor because the nano-structure is not dense, but instead contains a large
volume of voids. Arriving adatom energy is a few tenths of an eV, and competes
with the surface free energy of the substrate as affected by the presence of
gas and other contaminant bonds. Low kinetic energy results in low surface
mobility and island-form condensation instead of uniform surface coverage and
growth. There is much application of PVD coating which is available at InstaDissertation.
COATING
MATERIALS
Specific PVD processes and coating materials have
been developed and optimized for the specific application. Coating materials
are classified as dielectric compounds, metals, alloys, or mixtures. The same
material can exhibit different optical, electrical, and mechanical properties
depending on the deposition process.
Titanium oxide is a unique example of a metal oxide
compound that, depending on deposition process parameters, can be made into
film layers that are: transparent, electrically conductive, chemically reactive
to light and bio-agents, chemically inert or exhibit spectrally selective
absorption. The dependent parameters are starting composition, oxidation state,
and crystalline structure and packing density.
In order to get more in-depth information about the
PVD students can easily contact online experts that are always there to assist
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